JPH0222837Y2 - - Google Patents

Info

Publication number
JPH0222837Y2
JPH0222837Y2 JP1983201057U JP20105783U JPH0222837Y2 JP H0222837 Y2 JPH0222837 Y2 JP H0222837Y2 JP 1983201057 U JP1983201057 U JP 1983201057U JP 20105783 U JP20105783 U JP 20105783U JP H0222837 Y2 JPH0222837 Y2 JP H0222837Y2
Authority
JP
Japan
Prior art keywords
presser
turntable
shaft
frame
presser block
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983201057U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60106244U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20105783U priority Critical patent/JPS60106244U/ja
Publication of JPS60106244U publication Critical patent/JPS60106244U/ja
Application granted granted Critical
Publication of JPH0222837Y2 publication Critical patent/JPH0222837Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP20105783U 1983-12-26 1983-12-26 回転円盤押え機構 Granted JPS60106244U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20105783U JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20105783U JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Publications (2)

Publication Number Publication Date
JPS60106244U JPS60106244U (ja) 1985-07-19
JPH0222837Y2 true JPH0222837Y2 (en]) 1990-06-20

Family

ID=30762486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20105783U Granted JPS60106244U (ja) 1983-12-26 1983-12-26 回転円盤押え機構

Country Status (1)

Country Link
JP (1) JPS60106244U (en])

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7138810B2 (en) 2002-11-08 2006-11-21 Cascade Microtech, Inc. Probe station with low noise characteristics
US7164279B2 (en) 1995-04-14 2007-01-16 Cascade Microtech, Inc. System for evaluating probing networks
US7176705B2 (en) 2004-06-07 2007-02-13 Cascade Microtech, Inc. Thermal optical chuck
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7190181B2 (en) 1997-06-06 2007-03-13 Cascade Microtech, Inc. Probe station having multiple enclosures
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7221146B2 (en) 2002-12-13 2007-05-22 Cascade Microtech, Inc. Guarded tub enclosure
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7268533B2 (en) 2001-08-31 2007-09-11 Cascade Microtech, Inc. Optical testing device
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7330023B2 (en) 1992-06-11 2008-02-12 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7348787B2 (en) 1992-06-11 2008-03-25 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7352168B2 (en) 2000-09-05 2008-04-01 Cascade Microtech, Inc. Chuck for holding a device under test
US7368925B2 (en) 2002-01-25 2008-05-06 Cascade Microtech, Inc. Probe station with two platens
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7498828B2 (en) 2002-11-25 2009-03-03 Cascade Microtech, Inc. Probe station with low inductance path
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
US7554322B2 (en) 2000-09-05 2009-06-30 Cascade Microtech, Inc. Probe station

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7330023B2 (en) 1992-06-11 2008-02-12 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7589518B2 (en) 1992-06-11 2009-09-15 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7595632B2 (en) 1992-06-11 2009-09-29 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7492147B2 (en) 1992-06-11 2009-02-17 Cascade Microtech, Inc. Wafer probe station having a skirting component
US7348787B2 (en) 1992-06-11 2008-03-25 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US7164279B2 (en) 1995-04-14 2007-01-16 Cascade Microtech, Inc. System for evaluating probing networks
US7321233B2 (en) 1995-04-14 2008-01-22 Cascade Microtech, Inc. System for evaluating probing networks
US7190181B2 (en) 1997-06-06 2007-03-13 Cascade Microtech, Inc. Probe station having multiple enclosures
US7436170B2 (en) 1997-06-06 2008-10-14 Cascade Microtech, Inc. Probe station having multiple enclosures
US7626379B2 (en) 1997-06-06 2009-12-01 Cascade Microtech, Inc. Probe station having multiple enclosures
US7616017B2 (en) 1999-06-30 2009-11-10 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7352168B2 (en) 2000-09-05 2008-04-01 Cascade Microtech, Inc. Chuck for holding a device under test
US7554322B2 (en) 2000-09-05 2009-06-30 Cascade Microtech, Inc. Probe station
US7423419B2 (en) 2000-09-05 2008-09-09 Cascade Microtech, Inc. Chuck for holding a device under test
US7518358B2 (en) 2000-09-05 2009-04-14 Cascade Microtech, Inc. Chuck for holding a device under test
US7514915B2 (en) 2000-09-05 2009-04-07 Cascade Microtech, Inc. Chuck for holding a device under test
US7501810B2 (en) 2000-09-05 2009-03-10 Cascade Microtech, Inc. Chuck for holding a device under test
US7268533B2 (en) 2001-08-31 2007-09-11 Cascade Microtech, Inc. Optical testing device
US7368925B2 (en) 2002-01-25 2008-05-06 Cascade Microtech, Inc. Probe station with two platens
US7138810B2 (en) 2002-11-08 2006-11-21 Cascade Microtech, Inc. Probe station with low noise characteristics
US7498828B2 (en) 2002-11-25 2009-03-03 Cascade Microtech, Inc. Probe station with low inductance path
US7639003B2 (en) 2002-12-13 2009-12-29 Cascade Microtech, Inc. Guarded tub enclosure
US7221146B2 (en) 2002-12-13 2007-05-22 Cascade Microtech, Inc. Guarded tub enclosure
US7468609B2 (en) 2003-05-06 2008-12-23 Cascade Microtech, Inc. Switched suspended conductor and connection
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7876115B2 (en) 2003-05-23 2011-01-25 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7362115B2 (en) 2003-12-24 2008-04-22 Cascade Microtech, Inc. Chuck with integrated wafer support
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
US7504823B2 (en) 2004-06-07 2009-03-17 Cascade Microtech, Inc. Thermal optical chuck
US7176705B2 (en) 2004-06-07 2007-02-13 Cascade Microtech, Inc. Thermal optical chuck
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors

Also Published As

Publication number Publication date
JPS60106244U (ja) 1985-07-19

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